We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Digital Mass Flow Controller.
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Digital Mass Flow Controller Product List and Ranking from 4 Manufacturers, Suppliers and Companies

Digital Mass Flow Controller Product List

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MODEL EX-250S SERIES

MODEL EX-250S SERIES

RS485 communication function available! Compact design digital mass flow controller/meter.

The "MODEL EX-250S SERIES" is a compact digital mass flow controller/meter that allows for the switching of gas types using a rotary switch. It features RS485 communication capabilities and offers selectable analog input/output of 0-5VDC/4-20mA, as well as power supply options of ±15VDC/24VDC. The total flow control range has a response time of within 1 second. Please feel free to consult us when you need assistance. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 5 SCCM to 10 SLM ■ Accuracy: ±1% F.S. ■ Compact design ■ Gas type switching possible with a rotary switch *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter

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Digital Mass Flow Controller "Aera FC-DR980"

Digital Mass Flow Controller "Aera FC-DR980"

It combines excellent performance, operational versatility, and ease of use, contributing to significant cost reduction.

The "Aera FC-DR980" is a digital mass flow controller that offers excellent versatility and is compatible with many systems. With high-quality electronic components and a durable design, it withstands harsh operations and demonstrates outstanding long-term zero drift stability of less than 0.5% of full-scale flow even after more than a year. 【Features】 ■ Selectable modes: Analog, Analog/Digital, Digital ■ Piezo-controlled valve ■ Various alarm/diagnostic functions ■ Selectable gases and flow ranges 　※ Supported by multi-gas and multi-range specification models *For more details, please refer to the PDF documentation or feel free to contact us.

  • valve

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MODEL EX-550 SERIES

MODEL EX-550 SERIES

Introducing metal seal digital mass flow controllers/meters for N2, Air, H2, and more!

The "MODEL EX-550 SERIES" is a metal-sealed digital mass flow controller/meter that allows for gas type switching via a rotary switch. It enables high-precision measurement with S.P. accuracy, and the entire flow control range responds within 1 second. It features RS485 communication capabilities and allows for the selection of analog input/output of 0-5VDC/4-20mA and power supply of ±15VDC/24VDC. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: 10 SCCM to 5 SLM ■ Accuracy: ±1% S.P. (25-100% F.S.), ±0.25% F.S. (up to 25% F.S.) ■ High-precision measurement is possible with S.P. accuracy ■ Gas type switching is possible via a rotary switch *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Gas Mixing Device "BRENDA SERIES"

Gas Mixing Device "BRENDA SERIES"

Automatic calculation of gas flow rates for each line! Remote control via mobile devices is possible.

The "BRENDA SERIES" has made it possible to produce mixed gases with an accurate gas mixing ratio using a high-performance digital mass flow controller. Additionally, the adoption of an 8-inch touch panel has simplified the setting of mixed gas concentration and flow rate. This product is also feature-rich, equipped with a standard VNC server function, enabling remote operation via a network and remote control via mobile devices through a wireless access point. 【Features】 ■ High-performance digital mass flow controller ■ Ratio setting mode ■ Step mode ■ VNC server function ■ Data logging function *For more details, please refer to the PDF document or feel free to contact us.

  • Gas Generator

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Digital Mass Flow Controller Aera Transformer

Digital Mass Flow Controller Aera Transformer

Inclusive communication and control! A versatile mass flow controller that contributes to cost reduction.

The "Aera Transformer" is a digital mass flow controller suitable for various applications such as CAD, PVD, diffusion, and etching. The thin film growth and etching characteristics produced by this product boast excellent homogeneity and high reproducibility. With outstanding responsiveness, accuracy, and reproducibility, it enhances the productivity and yield of the equipment. 【Features】 ■ Multi-gas, multi-range ■ High-speed responsiveness ■ 100% metal seal, high-purity design ■ Compatible with DeviceNet, RS-485, and analog control *For more details, please refer to the PDF document or feel free to contact us.

  • valve

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Aera Transformer Digital Mass Flow Controller

Aera Transformer Digital Mass Flow Controller

Versatile MFC that contributes to cost reduction.

The Aera Transformer digital mass flow controllers (MFC) and digital mass flow meters (MFM), suitable for various applications such as CVD, PVD, diffusion, and etching, contribute to your process improvements by achieving excellent flexibility and efficiency, thereby enhancing yield, increasing productivity, and reducing costs. Equipped with new sensor and valve technologies, proven core components in the field, and high-speed digital circuits, they enable precise gas flow control. They boast outstanding reliability, exceptional responsiveness, accuracy, and reproducibility, and offer a versatile range of single gas and multi-gas, multi-range MFCs tailored to the values and functions prioritized by our customers.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Aera FC-DR980 Digital Mass Flow Controller

Aera FC-DR980 Digital Mass Flow Controller

Advanced digital MFC/MFM with excellent versatility, compatible with many systems.

To be used in accordance with existing main control methods and communication methods, analog or digital control is performed according to various output forms. This product is available in a single gas model and a multi-gas, multi-range model to meet customer requirements. The multi-gas, multi-range model contributes to a significant reduction in spare MFC inventory, thereby achieving cost reduction. Additionally, to comprehensively monitor and control flow rates, it utilizes RS-485 communication functionality (with RS-232 communication functionality via a converter) and multiple diagnostic and alarm functions, allowing for quick access to operational parameters.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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