Compact Digital Mass Flow Controller
Supports 300mm wafer process.
Mass flow controller that achieves high precision and fast response over a wide range.
- Company：川口液化ケミカル 川口事業所
- Price：Other
Digital Mass Flow Controller - List of Manufacturers, Suppliers, Companies and Products
Digital Mass Flow Controller Product List
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Aera Transformer Digital Mass Flow Controller
Versatile MFC that contributes to cost reduction.
The Aera Transformer digital mass flow controllers (MFC) and digital mass flow meters (MFM), suitable for various applications such as CVD, PVD, diffusion, and etching, contribute to your process improvements by achieving excellent flexibility and efficiency, thereby enhancing yield, increasing productivity, and reducing costs. Equipped with new sensor and valve technologies, proven core components in the field, and high-speed digital circuits, they enable precise gas flow control. They boast outstanding reliability, exceptional responsiveness, accuracy, and reproducibility, and offer a versatile range of single gas and multi-gas, multi-range MFCs tailored to the values and functions prioritized by our customers.
- Company：日立Astemo＆ナガノ
- Price：Other
Aera FC-DR980 Digital Mass Flow Controller
Advanced digital MFC/MFM with excellent versatility, compatible with many systems.
To be used in accordance with existing main control methods and communication methods, analog or digital control is performed according to various output forms. This product is available in a single gas model and a multi-gas, multi-range model to meet customer requirements. The multi-gas, multi-range model contributes to a significant reduction in spare MFC inventory, thereby achieving cost reduction. Additionally, to comprehensively monitor and control flow rates, it utilizes RS-485 communication functionality (with RS-232 communication functionality via a converter) and multiple diagnostic and alarm functions, allowing for quick access to operational parameters.
- Company：日立Astemo＆ナガノ
- Price：Other
